Simulation of impurity diffusion near the polysilicon-silicon interface / [Auth.]:O.I.Velichko,F.F.Komarov,N.M.Lukanov,A.N.Muchinskii,V.A.Tsurko
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| Format: | |
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| Published: | Minsk , 1997 |
| Physical Description: |
11 p.
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| Language: | English |
| Series: |
Prepr.
N.7(530) |
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ОФХ отдела книгохранения
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