Deep ion implantation: Advantages and current problems
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| Format: | |
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| Main Author: | Slowinski, B. |
| Published: | Dubna : The Joint Inst. for Nuclear Research , 1998 |
| Physical Description: |
4 p.
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| Language: | English |
| Series: |
Prepr.
E14-98-379 ) |
| Subjects: |
ОФХ отдела книгохранения
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