Fine line device fabrication / [guest editor: Fabian Pease]
Сохранено в:
Вид документа: | |
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Опубликовано: | New York : Institute of Electrical and Electronics Engineers , 1978 |
Физические характеристики: |
С. 401―500 : іл. ; 28 см
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Язык: | Английский |
Серия: |
IEEE transactions on electron devices
vol. 25, № 4 |
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